April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
NM07.01.04
Impact of Oxygen on CVD Grown Boron Nitride Layers
When and Where
Apr 18, 2021
9:15am - 9:30am
9:15am - 9:30am
NM07
Presenter(s)
Co-Author(s)
Mohammad Malik1,Bin Wang1,2,Sahar Jaddi1,Yiyi Yan1,Victor Reis1,Yun Zeng2,Thomas Pardoen1,Benoît Hackens1,Jean-Pierre Raskin1
UCLouvain1,Hunan University2
Keywords
annealing | chemical vapor deposition (CVD) (chemical reaction) | oxidation
Symposium Organizers
Thomas Kempa, Johns Hopkins University
Zakaria Al Balushi, University of California, Berkeley
Ying Fang, National Center for Nanoscience and Technology
Deep Jariwala, University of Pennsylvania
Symposium Support
Bronze
MilliporeSigma
MilliporeSigma
Session Chairs
Surendra Anantharaman
Thomas Kempa