November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
SF01.09.02
Late News: Atomic Layer Deposition of c-Axis-Oriented GeTe/Sb2Te3 Superlattice for Low-Power and Large-Capacity Phase Change Memory
When and Where
Dec 6, 2021
7:00pm - 7:15pm
7:00pm - 7:15pm
SF01-Virtual
Presenter(s)
Co-Author(s)
Chanyoung Yoo1,Woohyun Kim1,Jeong Woo Jeon1,Wonho Choi1,Byongwoo Park1,Gwangsik Jeon1,Yoon Kyeung Lee2,Cheol Seong Hwang1
Seoul National University1,Jeonbuk National University2
Keywords
atomic layer deposition
Symposium Organizers
Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester
Symposium Support
Bronze
Waterloo Institute for Nanotechnology
Waterloo Institute for Nanotechnology
Session Chairs
Noa Lachman
Kenneth Lau