Low Temperature Direct Growth of Multilayer Graphene on SiN_x/Si Through Ni Catalyzed Solid Phase Reaction for EUV Pellicle

Dec 7, 2021
10:40am - 10:45am

EQ20-Virtual

Hyeyoung Kim

Sangmin Lee

Seul-Gi Kim

Ki-Bum Kim

Hyun-Mi Kim

Ji-Beom Yoo

Hyeyoung Kim^1,2,Junhyeok Jeon^1,2,Sangmin Lee¹,Seul-Gi Kim¹,Ki-Bum Kim³,Hyeongkeun Kim¹,Hyun-Mi Kim¹,Ji-Beom Yoo²

Korea Electronics Technology Institute¹,Sungkyunkwan University²,Seoul National University³

2D materials | nucleation & growth | transmission electron microscopy (TEM)

Zakaria Al Balushi, University of California, Berkeley

Cinzia Casiraghi, University of Manchester

Joshua Robinson, The Pennsylvania State University

Hyeon Jin Shin, Samsung Advanced Institute of Technology

Silver
Penn State 2DCC-MIP

Cinzia Casiraghi

Andres Castellanos-Gomez

Low Temperature Direct Growth of Multilayer Graphene on SiNx/Si Through Ni Catalyzed Solid Phase Reaction for EUV Pellicle