November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ17.14.04
Investigation of Ni/Au/Ni Ohmic Contact and Dry Etch Mask to p-type GaN for Vertical Top-Down Nanowire Optoelectronics
When and Where
Dec 7, 2021
2:15pm - 2:30pm
2:15pm - 2:30pm
EQ17-Virtual
Presenter(s)
Co-Author(s)
Matthew Seitz1,Bryan Melanson1,Matthew Hartensveld1,Jing Zhang1
Rochester Institute of Technology1
Keywords
interface | lithography (deposition) | reactive ion etching
Symposium Organizers
Philip Schulz, Centre National de la Recherche Scientifique
Stefaan De Wolf, King Abdullah University of Science and Technology
Alex Martinson, Argonne National Laboratory
Monica Morales-Masis, University of Twente
Session Chairs
Erkan Aydin
Philip Schulz