November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ02.02.01
SiC Stackable Electronics Using Remote Epitaxy
When and Where
Nov 30, 2021
1:30pm - 2:00pm
1:30pm - 2:00pm
Hynes, Level 2, Room 200
Presenter(s)
Co-Author(s)
Rachael Myers-Ward1,Daniel Pennachio1,Jeehwan Kim2,Kuan Qiao2,Yeongin Kim2,Matthew Dejarld1,Shojan Pavunny1,Jenifer Hajzus1,D Gaskill1
Naval Research Laboratory1,Massachusetts Institute of Technology2
Keywords
chemical vapor deposition (CVD) (deposition)
Symposium Organizers
Jeehwan Kim, Massachusetts Institute of Technology
Kyusang Lee, University of Virginia
Xiuling Li, University of Illinois at Urbana-Champaign
Feng Miao, Nanjing University
Session Chairs
Xiuling Li
Rachael Myers-Ward