November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ11.04.03

Self-Aligned Amorphous Indium-Gallium-Zinc-Oxide TFTs Breaking the GHz Threshold

When and Where

Dec 2, 2021
11:00am - 11:15am
Hynes, Level 1, Room 111

Presenter(s)

Co-Author(s)

Christian Tückmantel1,Utpal Kalita1,Tobias Haeger1,Manuel Theisen1,Ullrich Pfeiffer1,Thomas Riedl1

University of Wuppertal1

Keywords

lithography (deposition) | sputtering

Symposium Organizers

Hans Kleemann, Technische Universität Dresden iAPP
Mario Caironi, Istituto Italiano di Tecnologia
Antonio Facchetti, Northwestern University/Flexterra Inc
Jun Takeya, The University of Tokyo

Symposium Support

Bronze
Novaled GmbH

Session Chairs

Giuseppe Giccone
Jörn Vahland

In this Session