November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ19.01.03
Phosphorus Incorporation and Its Effects on Residual Stress in Linear Antenna CVD Nanocrystalline Diamond Films
When and Where
Dec 7, 2021
2:30pm - 2:45pm
2:30pm - 2:45pm
EQ19-Virtual
Presenter(s)
Co-Author(s)
Ken Haenen1,2,Rani Mary Joy1,2,Paulius Pobedinskas1,2,Daen Jannis3,Nicolas Gauquelin3,Kamatchi Sankaran4,Fernando Lloret5,Derese Desta1,Hans-Gerd Boyen1,2,Jan D'Haen1,2,Johan Verbeeck3
Hasselt University1,IMEC vzw2,University of Antwerp3,CSIR4,Universidad de Cádiz5
Keywords
diamond | plasma-enhanced CVD (PECVD) (chemical reaction)
Symposium Organizers
Anke Krueger, Julius-Maximilians-Universität Würzburg
Emmanuel Scorsone, Commissariat à l’énergie atomique et aux énergies alternatives
Mariko Suzuki, University of Cádiz
Oliver Williams, Cardiff University School of Physics and Astronomy
Session Chairs
Mariko Suzuki