Transport Regimes, Material Utilization Efficiency and Film Production Rate in Low Pressure Organic Vapor Phase Deposition

Dec 6, 2021
2:30pm - 2:45pm

EQ06-Virtual

Giselle Roca

Boning Qu

Max Shtein

Ikenna Ozofor¹,Cecelia Kinane¹,Giselle Roca¹,Boning Qu¹,Stephen Forrest¹,Max Shtein¹

University of Michigan¹

diffusion | physical vapor deposition (PVD)

Ioannis Kymissis, Columbia University

Paddy K. L. Chan, University of Hong Kong

Oana Jurchescu, Wake Forest University

Brendan O'Connor, North Carolina State University

Oana Jurchescu