November 29 - December 2, 2021

Boston, Massachusetts

December 6 - 8, 2021 (Virtual)

2021 MRS Fall Meeting

DS02.15.04

Kinetic Monte Carlo Study of the Atomic Layer Deposition of Titanium Nitride

When and Where

Dec 7, 2021
11:20am - 11:25am

DS02-Virtual

Presenter(s)

Sangtae Kim

Hyungmin An

Sangmin Oh

Jiho Lee

Seungwu Han

Co-Author(s)

Sangtae Kim¹,Hyungmin An¹,Sangmin Oh¹,Jiho Lee¹,Seungwu Han¹

Seoul National University¹

Keywords

chemical reaction

Symposium Organizers

Enrique Martinez, Clemson University

David Aristoff, Colorado State University

Jutta Rogal, New York University

Gideon Simpson, Drexel University

Session Chairs

Richard Henning

Manon Michel

In this Session