November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
SF01.08.02
ALD Growth of High-κ Dielectrics on Monolayer MoS2—The Role of the Substrate
When and Where
Dec 6, 2021
1:30pm - 1:45pm
1:30pm - 1:45pm
SF01-Virtual
Presenter(s)
Co-Author(s)
Emanuela Schilirò1,Raffaella Lo Nigro1,Salvatore Ethan Panasci2,SimonPietro Agnello3,Franco Gelardi3,Fabrizio Roccaforte1,Filippo Giannazzo1
CNR-IMM of Catania1,University of Catania2,University of Palermo3
Keywords
morphology | nucleation & growth
Symposium Organizers
Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester
Symposium Support
Bronze
Waterloo Institute for Nanotechnology
Waterloo Institute for Nanotechnology
Session Chairs
Maarit Karppinen
Graziella Malandrino