November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ09.07.02
Time Resolved Ion and Electron Energy Distribution Functions During a HiPIMS Discharge
When and Where
Dec 1, 2021
4:30pm - 4:45pm
4:30pm - 4:45pm
Hynes, Level 1, Room 104
Presenter(s)
Co-Author(s)
David Barlaz1,Zach Jeckell1,Wolfgang Huber2,Tom Houlahan2,Ian Haehnlein2,Brian Jurczyk2,David Ruzic1
Univ of Illinois1,Starfire Industries2
Keywords
focused ion beam (FIB) | physical vapor deposition (PVD) | plasma deposition
Symposium Organizers
Davide Mariotti, Ulster University
Rebecca Anthony, Michigan State University
Wei-Hung Chiang, National Taiwan University of Science and Technology
Chi-Chin Wu, U.S. Army Research Laboratory
Session Chairs
Rebecca Anthony
Chi-Chin Wu