November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
SF01.10.03
Nanoscale Investigation of Al2O3 Thin Layers by Thermal- and Plasma-Enhanced Atomic Layer Deposition for Power Devices
When and Where
Dec 7, 2021
11:15am - 11:30am
11:15am - 11:30am
SF01-Virtual
Presenter(s)
Co-Author(s)
Raffaella Lo Nigro1,Emanuela Schilirò1,Patrick Fiorenza1,Filippo Giannazzo1,Guido Condorelli2,Marzia Monforte2,Fabrizio Roccaforte1
CNR1,Università degli Studi di Catania2
Keywords
interface | metalorganic deposition
Symposium Organizers
Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester
Symposium Support
Bronze
Waterloo Institute for Nanotechnology
Waterloo Institute for Nanotechnology
Session Chairs
Sung Gap Im
Kevin Musselman