November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ13.04.04
Synthesis of Silicon Nitride Nanoparticle Films from Silane-Nitrogen Non-Thermal Radio-Frequency Plasma
When and Where
Nov 30, 2021
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Gunnar Nelson1,Himashi Andaraarachchi1,Ognjen Ilic1,Uwe Kortshagen1
University of Minnesota Twin Cities1
Keywords
nanoscale | plasma deposition
Symposium Organizers
Andriy Zakutayev, National Renewable Energy Laboratory
Bjorn Alling, Linkoping University
Rachel Oliver, University of Cambridge
Minghui Yang, Chinese Academy of Sciences
Symposium Support
Silver
Taiyo Nippon Sanso
Taiyo Nippon Sanso
Session Chairs
Wenhao Sun
Andriy Zakutayev