November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EN15.01.04
Manufacturable Process for Thick Epitaxial BaTiO3 Films Integrated on Silicon for Electro-Optic Modulators
When and Where
Nov 30, 2021
2:30pm - 2:45pm
2:30pm - 2:45pm
Sheraton, 3rd Floor, Clarendon
Presenter(s)
Co-Author(s)
Agham Posadas1,Hyoju Park1,Marc Reynaud1,Wei Cao2,Goran Mashanovich2,Jamie Warner1,Alex Demkov1
The University of Texas at Austin1,University of Southampton2
Keywords
scanning transmission electron microscopy (STEM) | sputtering
Symposium Organizers
Subhash L. Shinde, ND Energy, University of Notre Dame
Asif Khan, Georgia Institute of Technology
Hui Jae Yoo, Intel Corporation
Iuliana Radu, imec
Session Chairs
Subhash L. Shinde
Hui Jae Yoo