November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
SF01.06.01
The Triumphs and Tragedies of Spatial Atomic Layer Deposition
When and Where
Dec 2, 2021
10:30am - 11:00am
10:30am - 11:00am
Sheraton, 3rd Floor, Berkeley
Presenter(s)
Co-Author(s)
David Munoz-Rojas1
LMGP Grenoble INP/CNRS1
Keywords
3D printing | chemical vapor deposition (CVD) (deposition) | selective area deposition
Symposium Organizers
Noa Lachman, Tel Aviv University
Graziella Malandrino, Univ di Catania
Kevin Musselman, University of Waterloo
Wyatt Tenhaeff, University of Rochester
Symposium Support
Bronze
Waterloo Institute for Nanotechnology
Waterloo Institute for Nanotechnology
Session Chairs
Ni Huo
Mitisha Surana