November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ13.11.01
Control of Ferroelectric Property in (Al1-xScx)N Films Prepared by Sputtering Method
When and Where
Dec 7, 2021
8:00am - 8:30am
8:00am - 8:30am
EQ13-Virtual
Presenter(s)
Co-Author(s)
Hiroshi Funakubo1,Shinnosuke Yasuoka1,Ryoich Mizutani1,Takahisa Shiraishi1,Akinori Tateyama1,Takao Shimizu1,2,Masato Uehara3,Hiroshi Yamada3,Morito Akiyama3,Yoshiomi Hiranaga4,Yasuo Cho4
Tokyo Institute of Technology1,National Institute for Materials Science2,National Institute of Advanced Industrial Science and Technology3,Tohoku University4
Keywords
Al | N
Symposium Organizers
Andriy Zakutayev, National Renewable Energy Laboratory
Bjorn Alling, Linkoping University
Rachel Oliver, University of Cambridge
Minghui Yang, Chinese Academy of Sciences
Symposium Support
Silver
Taiyo Nippon Sanso
Taiyo Nippon Sanso
Session Chairs
Debdeep Jena
Minghui Yang