November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ20.23.07
Ultra-Thin Amorphous Boron Oxynitride Dielectric Produced by RF Magnetron Sputtering
When and Where
Dec 7, 2021
8:00pm - 8:15pm
8:00pm - 8:15pm
EQ20-Virtual
Presenter(s)
Co-Author(s)
Andrey Voevodin1,Corey Arnold1,Chukwudi Iheomamere1,Spencer Gellerup1,Nicholas Glavin2,Christopher Muratore3,Nigel Shepherd1
University of North Texas1,Air Force Research Laboratory2,University of Dayton3
Keywords
sputtering | thin film
Symposium Organizers
Zakaria Al Balushi, University of California, Berkeley
Cinzia Casiraghi, University of Manchester
Joshua Robinson, The Pennsylvania State University
Hyeon Jin Shin, Samsung Advanced Institute of Technology
Symposium Support
Silver
Penn State 2DCC-MIP
Penn State 2DCC-MIP
Session Chairs
Zakaria Al Balushi
Nicholas Trainor