November 29 - December 2, 2021
Boston, Massachusetts
December 6 - 8, 2021 (Virtual)
2021 MRS Fall Meeting
EQ09.07.04
Plasma Enhanced Low Temperature Processing for Dopants Activation in CMOS Devices
When and Where
Dec 1, 2021
5:00pm - 5:15pm
5:00pm - 5:15pm
Hynes, Level 1, Room 104
Presenter(s)
Co-Author(s)
Yuanning Chen1,Orlando Auciello2,Israel Mejia3
MicorSol Technologies Inc.1,The University of Texas at Dallas2,Center for Engineering and Industrial Development3
Keywords
annealing | Si | thermal diffusivity
Symposium Organizers
Davide Mariotti, Ulster University
Rebecca Anthony, Michigan State University
Wei-Hung Chiang, National Taiwan University of Science and Technology
Chi-Chin Wu, U.S. Army Research Laboratory
Session Chairs
Rebecca Anthony
Chi-Chin Wu