April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.06.02
Wet-Chemical Etching of Ruthenium for Advanced Interconnects
When and Where
Apr 24, 2019
4:00pm - 4:15pm
4:00pm - 4:15pm
PCC North, 200 Level, Room 221 B
Presenter(s)
Co-Author(s)
Harold Philipsen1,Nils Mouwen1,2,Sander Teck1,2,Wouter Monnens2,Quoc Toan Le1,Frank Holsteyns1,Herbert Struyf1
imec1,KU Leuven2
Keywords
thin film
Symposium Organizers
Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES
Symposium Support
ASM International NV
CEA, LETI
Entegris, Inc
TEL
CEA, LETI
Entegris, Inc
TEL
Session Chairs
Vincent Jousseaume
Andrew Simon