April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.07.07
Electrochemical Nanoimprinting of 3D Hierarchical Micro- and Nano-Structures in Silicon
Electrochemical Nanoimprinting of 3D Hierarchical Micro- and Nano-Structures in Silicon
When and Where
Apr 25, 2019
11:00am - 11:15am
11:00am - 11:15am
PCC North, 200 Level, Room 221 B
Presenter(s)
Co-Author(s)
Bruno Azeredo1,Aliaksandr Sharstniou1,Stanislau Niauzorau2
Arizona State University1,Belarusian State University2
Keywords
3D printing | Si
Symposium Organizers
Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES
Symposium Support
ASM International NV
CEA, LETI
Entegris, Inc
TEL
CEA, LETI
Entegris, Inc
TEL
Session Chairs
Chloe Guerin
Frank Mont