April 22 - 26, 2019

Phoenix, Arizona

2019 MRS Spring Meeting

EP07.01.03

Molecular Design of Ultrastiff ULK Dielectric Hybrid Films—Implications of Network Connectivity and Precursor Geometry

When and Where

Apr 23, 2019
11:30am - 11:45am

PCC North, 200 Level, Room 221 B

Presenter(s)

Karsu Kilic

Reinhold Dauskardt

Co-Author(s)

Karsu Kilic¹,Reinhold Dauskardt¹

Stanford University¹

Keywords

elastic properties | porosity

Symposium Organizers

Vincent Jousseaume, CEA-LETI

Silvia Armini, IMEC

Eiichi Kondoh, University of Yamanashi

Frank Mont, GLOBALFOUNDRIES

Symposium Support

ASM International NV
CEA, LETI
Entegris, Inc
TEL

Session Chairs

Silvia Armini

Vincent Jousseaume

In this Session