April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.07.03

Atomic Layer Deposition of Ru for Copper Metallization

When and Where

Apr 25, 2019
9:30am - 9:45am
PCC North, 200 Level, Room 221 B

Presenter(s)

Co-Author(s)

Anil Mane1,Yan Zhang1,Jeffrey Elam1

Argonne National Laboratory1

Keywords

atomic layer deposition | electrochemical synthesis

Symposium Organizers

Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES

Symposium Support

ASM International NV
CEA, LETI
Entegris, Inc
TEL

Session Chairs

Chloe Guerin
Frank Mont

In this Session