April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
ES10.06.32
Secondary Electron Emissive Coatings from ALD—Metal Oxides and Fluorides
When and Where
Apr 24, 2019
5:00pm - 7:00pm
5:00pm - 7:00pm
PCC North, 300 Level, Exhibit Hall C-E
Presenter(s)
Co-Author(s)
Maximilian Gebhard1,Mark Popecki2,Till Cremer2,Michael MInot2,Anil Mane1,Jeffrey Elam1
Argonne National Laboratory1,Incom Inc.2
Keywords
atomic layer deposition | nanoscale
Symposium Organizers
Feng Bai, Henan University
Ying-Bing Jiang, Angstrom Thin Film Technologies LLC
Yugang Sun,
Jiatao Zhang, Beijing Institute of Technology
Symposium Support
Henan University