April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
ES10.06.32

Secondary Electron Emissive Coatings from ALD—Metal Oxides and Fluorides

When and Where

Apr 24, 2019
5:00pm - 7:00pm
PCC North, 300 Level, Exhibit Hall C-E

Presenter(s)

Co-Author(s)

Maximilian Gebhard1,Mark Popecki2,Till Cremer2,Michael MInot2,Anil Mane1,Jeffrey Elam1

Argonne National Laboratory1,Incom Inc.2

Keywords

atomic layer deposition | nanoscale

Symposium Organizers

Feng Bai, Henan University
Ying-Bing Jiang, Angstrom Thin Film Technologies LLC
Yugang Sun,
Jiatao Zhang, Beijing Institute of Technology

Symposium Support

Henan University

Session Chairs

In this Session