April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP09.09.02
Self-Assembled Monolayers (SAMs) for Hyperselective Silicide, Metal and Interconnect Diffusion Barriers
When and Where
Apr 25, 2019
2:00pm - 2:15pm
2:00pm - 2:15pm
PCC North, 200 Level, Room 224 B
Presenter(s)
Co-Author(s)
Ashay Anurag1,Michael Breeden1,Jong Youn Choi1,Steven Wolf1,Christopher Ahles1,Andrew Kummel1
University of California, San Diego1
Keywords
atomic layer deposition | surface reaction
Symposium Organizers
Rinus Lee, GlobalFoundries
Kah-Wee Ang, National University of Singapore
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
John Robertson, Cambridge University
Symposium Support
Applied Materials, Inc.
Session Chairs
Rinus Lee
John Robertson
Shinichi Takagi