April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.07.04
Hyper-Selective Co Metal ALD on Cu and Pt Without Passivation
When and Where
Apr 25, 2019
10:15am - 10:30am
10:15am - 10:30am
PCC North, 200 Level, Room 221 B
Presenter(s)
Co-Author(s)
Michael Breeden1,Steven Wolf1,Scott Ueda1,Andrew Kummel1
University of California, San Diego1
Keywords
atomic layer deposition | Co | x-ray photoelectron spectroscopy (XPS)
Symposium Organizers
Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES
Symposium Support
ASM International NV
CEA, LETI
Entegris, Inc
TEL
CEA, LETI
Entegris, Inc
TEL
Session Chairs
Chloe Guerin
Frank Mont