April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
CP04.03.03

In Situ TEM Investigation of Low Resistivity NiSi Formation on Silicon Layer

When and Where

Apr 23, 2019
4:15pm - 4:30pm
PCC West, 100 Level, Room 102 A

Presenter(s)

Co-Author(s)

An-Yuan Hou1,Chih-Yang Huang1,Kuo Lun Tai1,Wen-Wei Wu1

National Chiao Tung University1

Keywords

annealing | Ni | thin film

Symposium Organizers

Timothy Rupert, University of California, Irvine
Fadi Abdeljawad, Clemson University
Julie Cairney, The University of Sydney
Jason Trelewicz, Stony Brook University

Session Chairs

Martin Harmer
Jason Trelewicz

In this Session