April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP07.06.01
Sputter Deposited Amorphous Carbon for Hard Mask with High Etch Resistance
When and Where
Apr 24, 2019
3:30pm - 4:00pm
3:30pm - 4:00pm
PCC North, 200 Level, Room 221 B
Presenter(s)
Co-Author(s)
Young-Chang Joo1
Seoul National University1
Keywords
C | sputtering
Symposium Organizers
Vincent Jousseaume, CEA-LETI
Silvia Armini, IMEC
Eiichi Kondoh, University of Yamanashi
Frank Mont, GLOBALFOUNDRIES
Symposium Support
ASM International NV
CEA, LETI
Entegris, Inc
TEL
CEA, LETI
Entegris, Inc
TEL
Session Chairs
Vincent Jousseaume
Andrew Simon