April 22 - 26, 2019
Phoenix, Arizona
2019 MRS Spring Meeting
EP09.08.09
Impact of Germanium Doping on the Mechanical Strength of Ultra-Low Oxygen Concentration Silicon Wafers
When and Where
Apr 25, 2019
11:15am - 11:30am
11:15am - 11:30am
PCC North, 200 Level, Room 224 B
Presenter(s)
Co-Author(s)
Junnan Wu1,2,Robert Standley2,Katharine Flores1
Washington University in St. Louis1,MEMC, LLC2
Keywords
dislocations | Ge | strength
Symposium Organizers
Rinus Lee, GlobalFoundries
Kah-Wee Ang, National University of Singapore
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
John Robertson, Cambridge University
Symposium Support
Applied Materials, Inc.
Session Chairs
Rinus Lee
John Robertson