December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
MT05.07.02
NanoFab-SIMS—A Promising Tool for the Characterization of Nanofeatures
When and Where
Dec 4, 2019
11:00am - 11:30am
11:00am - 11:30am
Hynes, Level 2, Room 204
Presenter(s)
Co-Author(s)
Christelle Guillermier1,Brett Lewis1,Fouzia Khanom1
Carl Zeiss SMT, Inc.1
Keywords
in situ | nanostructure | secondary ion mass spectroscopy (SIMS)
Symposium Organizers
Frances Allen, University of California, Berkeley
Alex Belianinov, Oak Ridge National Laboratory
Silke Christiansen, Helmholtz Zentrum Berlin für Materialien und Energie
Shane Cybart, University of California, Riverside
Symposium Support
Gold
Raith America, Inc.
Silver
ZEISS
Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
Raith America, Inc.
Silver
ZEISS
Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
Session Chairs
Alex Belianinov
Silke Christiansen