December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.09.04
Low-Temperature Self-Limiting Growth of β-Ga2O3 Films on Flexible Substrates via Plasma-Enhanced ALD
When and Where
Dec 4, 2019
3:30pm - 3:45pm
3:30pm - 3:45pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Saidjafarzoda Ilhom1,Adnan Mohammad1,Deepa Shukla1,2,Brian Willis2,Necmi Biyikli1
The University of Connecticut1,University of Connecticut2
Keywords
metalorganic deposition | plasma deposition
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Malancha Gupta
David Munoz-Rojas