December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.09.06
Electron Enhanced Atomic Layer Deposition (EE-ALD)
When and Where
Dec 4, 2019
4:00pm - 4:30pm
4:00pm - 4:30pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Steven George1
University of Colorado1
Keywords
atomic layer deposition | chemical vapor deposition (CVD) (deposition) | Co
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Malancha Gupta
David Munoz-Rojas