Structural Characterization of Phosphorus- and Nitrogen- Co-Doped Nano-Crystalline Diamond Grown by MW PE CVD

When and Where

Dec 3, 2019
8:00pm - 10:00pm

Hynes, Level 1, Hall B

Presenter(s)

Fernando Lloret

Sanakaran Kamatchi Jothiramalingam

Marina Gutierrez

Paulius Pobedinskas

Ken Haenen

Co-Author(s)

Fernando Lloret^1,2,Sanakaran Kamatchi Jothiramalingam^1,2,Marina Gutierrez³,Paulius Pobedinskas^1,2,Ken Haenen^1,2

Hasselt University¹,IMEC vzw²,Univ de Cadiz³

Keywords

diamond | plasma-enhanced CVD (PECVD) (deposition) | transmission electron microscopy (TEM)

Symposium Organizers

Mariko Suzuki, Cornes Technologies Ltd

Thomas Schuelke, Fraunhofer USA

Emmanuel Scorsone, CEA

Satoshi Yamasaki, National Institute of Advanced Industrial Science and Technology

Symposium Support

Silver
Seki Diamond Systems, Cornes Technologies

Bronze
Applied Diamond Inc.
DiamFab
ESIEE Paris - CCIR Paris Ile-de-France
Fraunhofer USA - Center for Coatings and Diamond Technologies
PhDTalent
Plasmability LLC

Session Chairs

Timothy Grotjohn

Paul May

Robert Nemanich

2019 MRS Fall Meeting