Real-Time In Situ Monitoring Atomic Layer Doping Processes for Group-III Doped ZnO Layers—Super-Cycle Versus Co-Dosing Approach

When and Where

Dec 3, 2019
8:00pm - 10:00pm

Hynes, Level 1, Hall B

Presenter(s)

Adnan Mohammad

Saidjafarzoda Ilhom

Deepa Shukla

Md Tashfiq Bin Kashem

ABM Hasan Talukder

Helena Silva

Ali Gokirmak

Brian Willis

Necmi Biyikli

Co-Author(s)

Adnan Mohammad¹,Saidjafarzoda Ilhom¹,Deepa Shukla¹,Md Tashfiq Bin Kashem¹,ABM Hasan Talukder¹,Helena Silva¹,Ali Gokirmak¹,Brian Willis¹,Necmi Biyikli¹

University of Connecticut¹

Keywords

atomic layer deposition

Symposium Organizers

Kevin Musselman, University of Waterloo

Stacey Bent, Stanford University

Karen Gleason, Massachusetts Institute of Technology

David Munoz-Rojas, LMGP Grenoble INP/CNRS

Symposium Support

Gold
GVD Corporation
Lam Research Corp

Silver
Specialty Coating Systems

Bronze
Waterloo Institute for Nanotechnology

Session Chairs

Graziella Malandrino

David Munoz-Rojas

2019 MRS Fall Meeting