December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
MT06.12.03
Investigating Thin Film Growth Mechanisms in Real Time Using RBS and XRD
When and Where
Dec 4, 2019
11:00am - 11:15am
11:00am - 11:15am
Hynes, Level 2, Room 209
Presenter(s)
Co-Author(s)
Andre Vantomme1,Jelle Demeulemeester1,Annelore Schrauwen1,Dries Smeets1,Koen van Stiphout1,Christopher B. Mtshali2,Christophe Detavernier3,Kristiaan Temst1,Lino M.C. Pereira1
KU Leuven1,Materials Research Group2,Ghent University3
Keywords
in situ | Rutherford Backscattering (RBS) | thin film
Symposium Organizers
Ashwin Shahani, University of Michigan
Guillaume Reinhart, Institut Matériaux Microélectronique Nanosciences de Provence
Damien Tourret, IMDEA
Amy Clarke, Colorado School of Mines
Symposium Support
Gold
Carl Zeiss Microscopy GmbH
Bronze
Protochips Inc.
Carl Zeiss Microscopy GmbH
Bronze
Protochips Inc.
Session Chairs
Guillaume Reinhart
Peter Voorhees