December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.09.07
Low-Temperature Synthesis and Characterization of Crystalline GaN Thin Films for Flexible/Wearable Electronic Devices Using Plasma-Assisted Atomic Layer Deposition
When and Where
Dec 4, 2019
4:30pm - 4:45pm
4:30pm - 4:45pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Deepa Shukla1,Saidjafarzoda Ilhom1,Adnan Mohammad1,Blaine Johs2,Necmi Biyikli1
University of Connecticut1,Film Sense LLC2
Keywords
plasma deposition
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Malancha Gupta
David Munoz-Rojas