December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.04.03
Area-Selective Atomic Layer Deposition of 2D WS2 Nanolayers
When and Where
Dec 3, 2019
11:00am - 11:15am
11:00am - 11:15am
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Ageeth Bol1,Shashank Balasubramanyam1,Mark Merkx1,Erwin Kessels1,Adrie Mackus1
Eindhoven University of Technology1
Keywords
atomic layer deposition | nanoscale
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
David Munoz-Rojas
Greg Randall