December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF01.10.37
Evaluation of Film Quality for Various Deposition Conditions of MOCVD MoS2 Films Fabricated with a Novel Mo Precursor i-Pr2DADMo(CO)3
When and Where
Dec 3, 2019
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Kota Yamazaki1,Yusuke Hibino1,Yuya Oyanagi1,Yusuke Hashimoto1,Naomi Sawamoto1,Hideaki Machida2,Masato Ishikawa2,Hiroshi Sudo2,Hitoshi Wakabayashi3,Atsushi Ogura1
Meiji University1,Gas-Phase Growth Ltd.2,Tokyo Institute of Technology3
Keywords
2D materials | chemical vapor deposition (CVD) (deposition)
Symposium Organizers
Zakaria Al Balushi, University of California, Berkeley
Deep Jariwala, University of Pennsylvania
Olga Kazakova, National Physical Laboratory
Amber McCreary, National Institute of Standards and Technology
Symposium Support
Gold
AIXTRON SE
Silver
2D Crystal Consortium - Materials Innovation Platform (2DCC-MIP)
Bronze
Accurion Inc.
IOP Publishing Ltd - 2D Materials
Scienta Omicron, Inc.
AIXTRON SE
Silver
2D Crystal Consortium - Materials Innovation Platform (2DCC-MIP)
Bronze
Accurion Inc.
IOP Publishing Ltd - 2D Materials
Scienta Omicron, Inc.
Session Chairs
Zakaria Al Balushi
Deep Jariwala
Olga Kazakova
Amber McCreary