December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
MT06.12.05

In Situ TEM Based Platform for Characterization of Semiconductor Fabrication Processes

When and Where

Dec 4, 2019
11:30am - 11:45am
Hynes, Level 2, Room 209

Presenter(s)

Co-Author(s)

Utkur Mirsaidov1

National University of Singapore1

Keywords

in situ | nanoscale | transmission electron microscopy (TEM)

Symposium Organizers

Ashwin Shahani, University of Michigan
Guillaume Reinhart, Institut Matériaux Microélectronique Nanosciences de Provence
Damien Tourret, IMDEA
Amy Clarke, Colorado School of Mines

Symposium Support

Gold
Carl Zeiss Microscopy GmbH

Bronze
Protochips Inc.

Session Chairs

Guillaume Reinhart
Peter Voorhees

In this Session