December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
MT06.12.05
In Situ TEM Based Platform for Characterization of Semiconductor Fabrication Processes
When and Where
Dec 4, 2019
11:30am - 11:45am
11:30am - 11:45am
Hynes, Level 2, Room 209
Presenter(s)
Co-Author(s)
Utkur Mirsaidov1
National University of Singapore1
Keywords
in situ | nanoscale | transmission electron microscopy (TEM)
Symposium Organizers
Ashwin Shahani, University of Michigan
Guillaume Reinhart, Institut Matériaux Microélectronique Nanosciences de Provence
Damien Tourret, IMDEA
Amy Clarke, Colorado School of Mines
Symposium Support
Gold
Carl Zeiss Microscopy GmbH
Bronze
Protochips Inc.
Carl Zeiss Microscopy GmbH
Bronze
Protochips Inc.
Session Chairs
Guillaume Reinhart
Peter Voorhees