December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
MT05.03.02
Fabrication of Single Atom Devices by Direct Write Nanofabrication
When and Where
Dec 3, 2019
9:30am - 10:00am
9:30am - 10:00am
Hynes, Level 2, Room 204
Presenter(s)
Co-Author(s)
Edward Bielejec1
Sandia National Laboratories1
Keywords
ion-implantation
Symposium Organizers
Frances Allen, University of California, Berkeley
Alex Belianinov, Oak Ridge National Laboratory
Silke Christiansen, Helmholtz Zentrum Berlin für Materialien und Energie
Shane Cybart, University of California, Riverside
Symposium Support
Gold
Raith America, Inc.
Silver
ZEISS
Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
Raith America, Inc.
Silver
ZEISS
Bronze
Kleindiek Nanotechnik GmbH
ORSAY PHYSICS
Ted Pella, Inc.
Session Chairs
Frances Allen
Alex Belianinov
Shane Cybart