December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
MT06.18.03
In Operando Scanning Electron Microscopy of Growth, Etch and Alloying Kinetics of Nanomaterials
When and Where
Dec 5, 2019
2:15pm - 2:30pm
2:15pm - 2:30pm
Hynes, Level 2, Room 209
Presenter(s)
Co-Author(s)
Ryo Mizuta1,Maik Simon2,3,Ye Fan1,Thomas Mikolajick2,3,Walter Weber2,3,Stephan Hofmann1
University of Cambridge1,Namlab gGmbH2,Center for Advancing Electronics Dresden3
Keywords
chemical vapor deposition (CVD) (deposition) | in situ | scanning electron microscopy (SEM)
Symposium Organizers
Ashwin Shahani, University of Michigan
Guillaume Reinhart, Institut Matériaux Microélectronique Nanosciences de Provence
Damien Tourret, IMDEA
Amy Clarke, Colorado School of Mines
Symposium Support
Gold
Carl Zeiss Microscopy GmbH
Bronze
Protochips Inc.
Carl Zeiss Microscopy GmbH
Bronze
Protochips Inc.
Session Chairs
Amy Clarke
Dongsheng Li
Guillaume Reinhart
Robert Sinclair