December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.06.24
Carbon Nanotubes Growth on TiSiN Barriers via Plasma Enhanced CVD—Analysis of the Physical and Chemical Processes and Modeling
When and Where
Dec 3, 2019
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Ahmed Andalouci1,Ivaylo Hinkov2,Salim Mourad Cherif1,Samir Farhat1
Université Paris 131,Département de Génie Chimique Université de Technologie Chimique et de Métallurgique2
Keywords
plasma-enhanced CVD (PECVD) (chemical reaction) | surface chemistry
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Graziella Malandrino
David Munoz-Rojas