December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.06.22
Effect of Plasma Ignition on Growth Temperature Decrease of Single-Walled Carbon Nanotubes Using Plasma-Coupled CVD System
When and Where
Dec 3, 2019
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Sung-Il Jo1,Goo-Hwan Jeong1
Kangwon National University1
Keywords
chemical vapor deposition (CVD) (deposition) | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Graziella Malandrino
David Munoz-Rojas