December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.02.09
Characterizing Ultra-Thin Layers Using High Resolution Low Energy Ion Scattering (LEIS)
When and Where
Dec 2, 2019
4:30pm - 4:45pm
4:30pm - 4:45pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Thomas Grehl1,Philipp Brüner1,Nathan Havercroft2
IONTOF GmbH1,ION-TOF USA, Inc.2
Keywords
atomic layer deposition | ion scattering spectroscopy (ISS)
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Sean Barry
Ralf Tonner