December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
EN15.03.14
Effect of Yb Doping on Piezoelectric Properties and Crystal Structure of AlN Piezo Thin Film
When and Where
Dec 2, 2019
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Masato Uehara1,Yuki Amano2,Sri Ayu Anggraini1,Kenji Hirata1,Hiroshi Yamada1,Morito Akiyama1
National Institute of Advanced Industrial Science and Technology1,Kyushu University2
Keywords
piezoresponse | sputtering
Symposium Organizers
Pu-Xian Gao, University of Connecticut
Paul Ohodnicki, National Energy Technology Laboratory
Lyubov Titova, Worcester Polytechnic Institute
Zhaoliang Zhang, University of Jinan
Session Chairs
Lyubov Titova
Zhaoliang Zhang