December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.06.19
Good Step Coverage of Iridium Metal Films by Spray CVD
When and Where
Dec 3, 2019
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall B
Presenter(s)
Co-Author(s)
Kazuhisa Kawano3,Yoshiyuki Seki1,Yutaka Sawada1,Hiroshi Funakubo2,Noriaki Oshima3
Tokyo Polytechnic University1,Tokyo Institute of Technology2,TOSOH Corporation3
Keywords
Ir | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Graziella Malandrino
David Munoz-Rojas