December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.09.03
Novel Approach for Conformal Chemical Vapour Phase Deposition of Ultra-Thin Conductive Silver Films
When and Where
Dec 4, 2019
2:15pm - 2:30pm
2:15pm - 2:30pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Sabrina Wack1,Renaud Leturcq1,Petru Lunca-Popa1,Noureddine Adjeroud1
LIST1
Keywords
Ag | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Malancha Gupta
David Munoz-Rojas