December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.11.10

Atomic Layer Processing—A Toolbox for Fabricating Novel Functional Hybrid Materials

When and Where

Dec 5, 2019
4:30pm - 5:00pm
Hynes, Level 3, Room 310

Presenter(s)

Co-Author(s)

Mato Knez1,2

CIC nanoGUNE1,IKERBASQUE2

Keywords

atomic layer deposition | electrical properties

Symposium Organizers

Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS

Symposium Support

Gold
GVD Corporation
Lam Research Corp

Silver
Specialty Coating Systems

Bronze
Waterloo Institute for Nanotechnology

Session Chairs

Mato Knez
David Munoz-Rojas

In this Session