December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.09.02
Relationship between the Gas-Phase Reactions Occurring within an Electron Cyclotron Resonance- (ECR) Microwave- (MW) CVD Process and the Properties of Hydrocarbon Films
When and Where
Dec 4, 2019
2:00pm - 2:15pm
2:00pm - 2:15pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Jesús García Figueroa1,David Harding1
Laboratory for Laser Energetics and Department of Chemical Engineering1
Keywords
plasma-enhanced CVD (PECVD) (deposition) | surface chemistry | thin film
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Malancha Gupta
David Munoz-Rojas