December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.02.08
Tensile Properties of ALD Alumina without Substrate Measured by Tensile Testing on Water Surface
When and Where
Dec 2, 2019
4:15pm - 4:30pm
4:15pm - 4:30pm
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Sangmin Lee1,Junmo Koo2,Junmo Kim1,Joon-Hyung Shim2,Taek-Soo Kim1
Korea Advanced Institute of Science and Technology (KAIST)1,Korea University2
Keywords
atomic layer deposition | thin film
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Sean Barry
Ralf Tonner