December 1 - 6, 2019
Boston, Massachusetts
2019 MRS Fall Meeting
FF05.08.03
Wafer Scale MOCVD Grown BN for Encapsulation of 2D Devices
When and Where
Dec 4, 2019
10:45am - 11:00am
10:45am - 11:00am
Hynes, Level 3, Room 310
Presenter(s)
Co-Author(s)
Michael Snure1,Shivashankar Vangala1,Gene Siegel2
Air Force Research Laboratory1,KBR2
Keywords
2D materials | chemical vapor deposition (CVD) (deposition)
Symposium Organizers
Kevin Musselman, University of Waterloo
Stacey Bent, Stanford University
Karen Gleason, Massachusetts Institute of Technology
David Munoz-Rojas, LMGP Grenoble INP/CNRS
Symposium Support
Gold
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
GVD Corporation
Lam Research Corp
Silver
Specialty Coating Systems
Bronze
Waterloo Institute for Nanotechnology
Session Chairs
Elisabeth Blanquet
Steven George